Amorphous silicon carbide thin films

Amorphous silicon carbide thin films

by Mariana Amorim Fraga
2/5

Silicon carbide (SiC) has been described as a suitable semiconductor material to use in MEMS and electronic devices for harsh environments.

This book presents fundamentals of amorphous silicon carbide thin films and their applications in piezoresistive se.

First published
2011
Publishers
Nova Science Publishers
Subjects
Silicon carbide·Amorphous semiconductors·Silicon-carbide thin films

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